Tris(tert-pentoxy)silanol - Alfa Chemistry

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Home > Products > Material & Chemicals > Micro/NanoElectronics > Tris(tert-pentoxy)silanol

Catalog Number

ACM17906353

Product Name

Tris(tert-pentoxy)silanol

Structure

CAS

17906-35-3

Synonyms

TRIS(TERT-PENTOXY)SILANOL;TRI-T-PENTOXYSILANOL;TRIS(TERT-PENTOXY)SILANOL99.99+%;Silicic acid (H4sio4), tris(1,1-dimethylpropyl) ester;Tri-t-pentoxysilanol (99.999%-Si) PURATREM;Tris(t-Pentoxy)Silanol

Molecular Formula

C₁₅H₃₄O₄Si

Molecular Weight

306.51

MSDS

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COA

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Spec Sheet

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Related Publications

1 Effect of catalyst layer density and growth temperature in rapid atomic layer deposition of silica using tris(tert-pentoxy)silanol.

Won SJ1, Kim JR, Suh S, Lee NI, Hwang CS, Kim HJ.

ACS Appl Mater Interfaces. 2011 May;3(5):1633-9. doi: 10.1021/am200176j. Epub 2011 May 3.

Rapid atomic layer deposition (RALD) of SiO₂ thin films was achieved using trimethyl-aluminum and tris(tert-pentoxy)silanol (TPS) as the catalyst and Si precursor, respectively. A maximum growth rate as high as ∼28 nm/cycle was obtained by optimizing the catalyst layer density, whereas the previous reports showed lower values of 12 to 17 nm/cycle [Hausmann et al. Science2002, 298, 402-406; Burton e ... Read More