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Catalog Number
ACM1115997
Product Name
Triethylgallium
Structure
CAS
1115-99-7
Synonyms
triethyl-galliu;GALLIUM TRIETHYL;TRIETHYLGALLIUM;Triethylgalliumcolorlessliq;Triethylgalliumelecgrcolorlessliq;Triethylgallium,elec.gr.(99.9999%-Ga)PURATREM;Triethylgallium,min.97%;Triethylgallium, min. 97%
Molecular Formula
C6H15Ga
Molecular Weight
156.91
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1 Atomic Layer Deposition of Gallium Oxide Films as Gate Dielectrics in AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistors.

Shih HY1, Chu FC2, Das A2, Lee CY2, Chen MJ1, Lin RM3.

Nanoscale Res Lett. 2016 Dec;11(1):235. doi: 10.1186/s11671-016-1448-z. Epub 2016 Apr 30.

In this study, films of gallium oxide (Ga2O3) were prepared through remote plasma atomic layer deposition (RP-ALD) using triethylgallium and oxygen plasma. The chemical composition and optical properties of the Ga2O3 thin films were investigated; the saturation growth displayed a linear dependence with respect to the number of ALD cycles. These uniform ALD films exhibited excellent uniformity and s ... Read More

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Contact us

Email:
Tel:1-201-478-8534
1-516-662-5404
Fax: 1-516-927-0118
Address: 2200 Smithtown Avenue, Room 1 Ronkonkoma, NY 11779-7329 USA