
Tantalum pentafluoride (TaF5) is an important reagent in fluorine chemistry. As a strong Lewis acid, a catalyst for fluorination reactions, and a source of tantalum, TaF5 is a useful reagent for the preparation of tantalum-containing materials. Sourcing high-purity TaF5 can be a challenge for research laboratories, microelectronics manufacturers, and specialty chemical producers. If you're looking to buy tantalum pentafluoride online, it's crucial to choose a reliable supplier that offers guaranteed purity, secure packaging, regulatory compliance, and strong traceability.
Alfa Chemistry is your trusted tantalum pentafluoride supplier, providing a convenient, professional, and reliable one-stop shopping experience. It's your ideal choice for sourcing tantalum pentafluoride.
| Catalog | Name | MSDS | SDS | Inquiry |
| OFC103055078 | Tantalum pentafluoride | Download MSDS | Download COA | Inquiry |
Offering high-purity (99.9%) tantalum pentafluoride with detailed MSDS/COA sheets, safe operation instructions, and professional technical support, we ensure your successful, efficient, and safe use of tantalum pentafluoride in R&D and production.
In this article, we will explore its structure and properties, synthetic routes, potential applications, processing protocols, and selection tips to help you decide whether to use TaF5 in your process or purchase it from your fluorine chemistry station.
Because of this combination of moderate volatility and strong Lewis acidity / fluoride affinity, TaF5 is a prized reagent in fluorine chemistry where controlled generation of fluoride species is needed.
Fig.1 Tantalum pentafluoride and its monohydrate[1].
TaF5 of 99.9% or higher purity is most often obtained by carefully removing oxide/oxygen and moisture impurities. The common synthesis routes are:
Reaction of TaCl5 (or intermediate tantalum oxychloride) with dry HF typically gives TaF5 and HCl as a byproduct. Reaction conditions are often carefully controlled with dry conditions or an inert atmosphere. This usually involves extreme dehydration and careful acid strength/stoichiometry to limit side hydrolysis. After reaction, sublimation/vacuum fractionation often can be used to purify the TaF5 from residual chloride or oxide.
Direct fluorination from fluorine gas (F2) or a fluorinating agent (ClF3, BrF3, etc.) at high temperature (200-300°C) in an inert container is another method. Tantalum metal is placed in the fluorine (or fluorine/inert gas carrier) and slowly heated/converted to gaseous TaF5, which is condensed.
Use of extreme manufacturing materials (Ni, monel, and fluorine alloys) and thermal control is required. Thermal runaway and decomposition can occur if the process is not strictly controlled. The gas handling and condensation system usually has to be very well controlled but should result in a high-purity product if done properly.
Carbonyl fluoride or other active fluorine donor systems are also used to convert tantalum oxide/oxyfluoride to TaF₅ in heated "dry" conditions in more specialized processes.
Crude TaF5 is often sublimated in a vacuum to a high-purity product. TaF5 is volatile at moderate temperatures, and a carefully controlled temperature gradient can often be used to separate higher-boiling and non-volatile impurities. This is often a necessary purification step to semiconductor or catalytic grade purity.

Due to its unique reactivity and volatility, tantalum pentafluoride is widely used in a variety of advanced fields. The following lists its main application areas and reviews how its properties are utilized.
| Application Domain | Role / Mechanism | Notes / Considerations |
| Catalysis / Superacid Systems | TaF5 acts as a strong Lewis acid or fluoride acceptor, especially when combined with HF or other superacid media | It is known to catalyze alkylation, isomerization, Friedel–Crafts type reactions, and fluorination of organic substrates. |
| Fluorination Catalyst & Fluorocarbon Synthesis | It promotes the insertion of fluoride or fluorine into organic molecules under controlled conditions | In fluorocarbon / hydrofluorocarbon synthesis, TaF5 can act as a fluorination promoter in HF media or with halogenated precursors. (lookchem.com) |
| Precursor to Tantalum Oxides / Oxyfluorides | By hydrolysis or thermal transformation, TaF5 can convert to Ta2O5 or TaOF species | Ta2O5 is widely used in dielectric films, capacitors, and high‐k oxides. |
| Semiconductor / Thin Films & CVD / ALD | As a volatile source of Ta in chemical vapor deposition (CVD) or atomic layer deposition (ALD) processes | Because TaF5 can evaporate under moderate heating, it is used to supply tantalum for thin films, barrier layers, or electrode deposition. |
| Metal Deposition / Electrochemical Methods | In molten salt or ionic liquid electrolytes containing TaF5, tantalum metal can be electrodeposited | This is useful in microelectronic or barrier-layer production, where pure metallic Ta films are needed. |
| Separation of Tantalum / Niobium (Analytical / Extraction Chemistry) | TaF5 helps form complex fluoride species that aid in fractional separation of Ta and Nb | For example, in the classic Marignac method, difference in solubility of fluoride complexes is exploited. |
While TaF5 is a high-value reagent, it requires strict safety practices. Below is a summary of hazards and recommended handling practices.
Hazard and Risk Overview

Personal Protective Equipment (PPE)
Best Practices
Storage and Disposal
Given the hazardous nature of hydrofluoric acid systems, ensuring safety and compatibility is paramount.
1. What is the advantage of tantalum pentafluoride over other fluoride acids or Lewis acids?
A: TaF5 offers a combination of strong fluoride affinity, volatility under moderate heating, and ability to form stable anionic fluorotantalate species. In many catalytic or deposition systems, this dual character (catalyst + volatile reagent) is hard to match with simpler fluoride acids.
2. Can I use TaF5 in aqueous systems or in water?
A: No, TaF5 hydrolyzes vigorously in the presence of water, producing HF and oxyfluoride species. It must be handled under strictly anhydrous conditions.
3. Is TaF5 stable at room temperature?
A: In a dry, sealed container, it is stable at room temperature. However, exposure to moisture or humidity rapidly degrades it, so good packaging and storage are essential.
4. What kind of containers or materials are safe to use with TaF5?
A: In general, fluorine-resistant metals (nickel, monel, and Hastelloy) or passivated alloys and fluoropolymer linings (PTFE, FEP) are preferred. Glass can be used if properly passivated, but one must avoid any surfaces that may react or degrade.
5. How do I dispose of excess or waste TaF5?
A: Neutralization must be carried out with extreme caution, often by controlled gradual hydrolysis under alkaline conditions, converting to stable fluoride salts. Ultimately, dispose of it via licensed hazardous waste facilities.
6. Can I buy tantalum pentafluoride online in small (gram-level) quantities?
A: Yes, many suppliers offer gram-scale packaging with inert sealing. However, due to its hazardous nature, shipping and regulatory compliance may limit some shipping destinations or require special handling.
7. What differentiates a high-quality tantalum pentafluoride supplier?
A: Key differentiators include rigorous purity and impurity reporting, moisture control in packaging, safe and compliant logistics, traceability, and technical support to users.
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Reference
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