Thin film deposition is one of the technical tools used in chemical manufacturing processes. We have experienced staff, as well as a wide range of processing tools. Our Leybold Heraeus Z-650 Sputtering System-based thin film deposition services can help you choose the best tools and processes for your research.
Leybold Heraeus Z-650 Sputtering System
1. Two chambers, one 5" target or two 75 mm targets each
2. Load-lock; liquid nitrogen Meissner traps and turbo pump on each chamber
3. 500 W DC power supplies, 600 W RF power supplies, sputter etch
4. Advanced Energy Pinnacle Plus Pulsed DC power supply
5. Secondary gas available: methane
If you would like to find out more about our Leybold Heraeus Z-650 Sputtering System-based thin film deposition services, please contact us directly.
For research use only, not intended for any clinical use.
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