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Thin Film Deposition Service—Kurt Lesker PVD 75 Sputtering System

Thin film deposition is one of the technical tools used in chemical manufacturing processes. We have experienced staff, as well as a wide range of processing tools. Our Kurt Lesker PVD 75 Sputtering System-based thin film deposition services can help you choose the best tools and processes for your research.

Name Of The Instrument/Platform

Kurt Lesker PVD 75 Sputtering System

Summary

1. Load-lock with auto transfer
2. 6" wafer capability
3. 6 targets (3" diameter)
4. Co-sputtering up to 4 sources
5. 800C substrate heater
6. RF or DC sputtering
7. RF sputter etch on substrate
8. Computer automation

If you would like to find out more about our Kurt Lesker PVD 75 Sputtering System-based thin film deposition services, please contact us directly.

For research use only, not intended for any clinical use.

Online Inquiry

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