Laboratory Services / Alfa Chemistry
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Thin Film Deposition Service—ATC Orion 5 UHV

Thin film deposition is one of the technical tools used in chemical manufacturing processes. We have experienced staff, as well as a wide range of processing tools. Our ATC Orion 5 UHV-based thin film deposition services can help you choose the best tools and processes for your research.

Name Of The Instrument/Platform

ATC Orion 5 UHV

Feature Highlights

The key features are:
1. target size: 2"
2. 3 RF and 2 DC guns
3. process gases: Ar, N2 and O2
4. heater up to 850℃
5. co-sputtering
6. uniformity better than 2.5% over 4" diameter samples

Summary

A very versatile system with many different target materials in stock and the possibility of co-sputtering. Aquiring new target materials is comparatively inexpensive due to the small target size of 2".

If you would like to find out more about our ATC Orion 5 UHV-based thin film deposition services, please contact us directly.

For research use only, not intended for any clinical use.

Online Inquiry

Please fill out the form below and we will get back to you as soon as possible with a quotation for the item you are interested in.

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