Scanning Electron Microscopy (SEM) provides high-resolution and high-depth-of-field images of the surface and near the surface of a sample. SEM is one of the most widely used analytical tools as it can quickly provide very detailed images. SEM provides elemental identification of almost the entire periodic table and is also adept at generating detailed images of surface topography. Alfa Chemistry offers FEI Helios Nanolab G3 CX DualBeam FIB/SEM-based scanning electron microscopy Imaging services available to assist customers in biological and materials research.
FEI Helios Nanolab G3 CX DualBeam FIB/SEM
MANUFACTURER: FEI
Techniques
1. Secondary electron (SE) imaging
2. Backscattered electron (BSE) imaging
3. Scanning transmission electron microscopy (STEM), including bright field (BF), dark field (DF) and high angle annular dark field (HAADF) modes
4. Energy-dispersive X-ray spectroscopy (EDX) - point mode and mapping (using the AZtec software) — 3D (using the INCA software)
5. Automatic acquisition of large images (using the MAPS software)
6. Correlative microscopy (using the MAPS software)
7. 3D (volumetric) imaging (using the automated Slice-and-View software)
8. Site-specific sample preparation for TEM, SIMS, atom probe and other analytical techniques
9. Nano-machining and nano-fabrication (using the Nanobuilder software)
10. Instrument specifications
Electron optics:
1. Elstar UHR immersion lens column
2. Schottky field emission source
3. Accelerating voltage range: 200 V to 30 kV
4. Beam deceleration with stage bias from -50 V to -4 kV
5. Probe current range: 0.8 pA to 22 nA
6. Landing energy range 20 eV to 30 keV
7. 0.8 nm resolution at 30 kV
8. 1.4 nm resolution at 1 kV
9. Elstar in-lens SE and BSE detectors (TLD)
10. Elstar in-column BSE detectors (Mirror Detector (MD) and ICD)
11. Everhart-Thornley SE detector (ETD)
12. Retractable low voltage, high contrast solid-state backscatter electron detector (CBS)
13. Retractable STEM detector with BF/DF/HAADF segments (STEM3)
Ion optics:
1. Tomohawk field emission focused ion beam optics
2. Liquid gallium metal ion source
3. Accelerating voltage range: 500 V to 30 kV
4. Probe current range: 0.1 pA to 65 nA
5. 4.0 nm resolution at 30 kV
6. FIB optimized secondary ion and electron detector (ICE)
Patterning:
1. High-resolution digital patterning engine controlled from the User Interface
2. Maximum resolution: 64k × 64k
3. Maximum pattern size: 16 mil. pixels per single pattern
4. Minimum Dwell Time: 25 ns/pixel
5. Maximum Dwell Time: 25 ms/pixel
6. Complex milling patterns through Bitmap import
7. GDSII file format support
8. Feature sizes down to 20-30 nm (sample dependent)
9. EasyLift EX NanoManipulator
10. Multichem gas delivery system (capable of depositing Pt, W, C, insulator, or of producing enhanced milling of C or insulator)
11. Oxford Instruments 80 mm2 X-Max SDD EDX detector optimized for detection from Be to Cf
12. Integrated plasma cleaner
13. Sample stages for standard stubs, mounts, TEM grids and others
14. Maximum sample size: 110 mm diameter
15. Maximum sample thickness: 61 mm incl. sample holder
16. Stage tilt range -15 to +90
It is the third generation of FEI's Helios Nanolab Ultra High Resolution Scanning Electron Microscope (SEM) equipped with Focused Ion Beam (FIB) technology, offering sub-nanometre resolution electron beam imaging over a large operating voltage range, 3D (volumetric) imaging, site-specific sample preparation and nano-fabrication capabilities.
The instrument is equipped with an array of in-lens, in-column, and chamber detectors, bright field, dark field and high angle annular dark field STEM detectors, and an 80 mm2 Oxford Instruments X-Max SDD EDX detector for microanalysis. Using FEI's MAPS imaging software, automatic acquisition of large images and correlative workflows, for example combining optical microscopy and SEM, are made possible.
The Scanning Electron Microscopy Laboratory at Alfa Chemistry offers a wide range of high-end microscopy equipment. More importantly, our expertise and experience are invaluable to the industries and customers we serve. Please do not hesitate to contact us for cooperation or questions.
For research use only, not intended for any clinical use.
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