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Nanomaterials Metrology Service—Kurt Lesker CMS-18 Dual Chamber Sputterer

In recent years, the new materials industry, especially the nanomaterials industry, has been growing with the increasing scientific research on new materials technology and nanotechnology, which has placed new and higher demands on the metrology work in the related fields. Nanomaterials metrology services are an area of expertise for Alfa Chemistry and we can provide our customers with solutions based on Kurt Lesker CMS-18 Dual Chamber Sputterer.

Name Of The Instrument/Platform

Kurt Lesker CMS-18 Dual Chamber Sputterer

Feature Highlights

1. Customizable automatic deposition recipes
2. (3) deposition guns on each chamber
3. Dedicated chambers for metals and insulators to reduce cross - contamination
4. RF and DC magnetron sputtering
5. Substrate RF bias
6. Substrate heating up to 800℃
7. Up to (3) process gases, allowing reactive sputtering

Summary

The Kurt Lesker CMS-18 sputtering system is composed of two independent chambers with a shared load-lock enabling versatile film depositions.

Alfa Chemistry' Nanomaterials Analysis Laboratory can provide Kurt Lesker CMS-18 Dual Chamber Sputterer-based nanomaterials metrology services to our clients. If you would like to receive details of this project, please contact us directly.

For research use only, not intended for any clinical use.

Online Inquiry

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