Nanofabrication Service—Wentworth MP-2300 Probe Station

Summary

The Wentwort MP-2300 semiautomatic 200 mm wafer prober is equipped with Labmaster 5.1 probing environment software and has a motorized XY- theta stage with 203 mm × 203 mm XY travel with 0.1 µm resolution and 5 mm Z travel and a 200 mm nickel plated wafer chuck with vacuum hold down. Probers include a CAP3000 computer assisted probe with 0.1 µm resolution, a CAP4000 submicron computer assisted probe with 0.01 µm resolution and two lower resolution manual probers. A Mitutoyo FS-70 microscope with motorized xyz movement and M Plan Apo 5×,10×,20× objectives and Pulnix TMC-7 CCD camera with flat panel monitor and motorized focus allow for visual scanning and image capture. A Newport Cleantop II vibration isolation table with maximum damping and a laminar flow hood provide a controlled probing environment.