Materials Characterization and Analysis Service—Perkin Elmer PHI-660 Scanning Auger Microscope

This facility utilizes a scanning Auger microprobe, which allows for analysis of surface composition using Auger electron spectroscopy (AES) with a submicron spatial resolution. This microprobe is used to produce:
1. Auger spectra
2. secondary electron images of surfaces
3. elemental line scans and maps
4. and depth profiles.
The depth distribution of components at and near the surface can be evaluated by using AES in conjunction with inert ion sputtering.
5. Auger spectra are obtained from the detection of emitted X-ray and Auger electrons, each of which possess energies characteristic of the parent element.
6. AES can detect all elements except H and He and.
7. AES is most sensitive to light elements. The spectra, however, are only representative of the elements in the topmost atomic layers.
8. The inert ion sputtering process uses an ion gun to accelerate inert gas ions toward the sample surface, removing the near surface atoms.
9. Sputtering can be used in combination with AES to produce elemental depth profiles which are useful in determining the thickness of the compositional layers nearest the surface.