Laser Analysis Service—Laser-Induced Breakdown Spectroscopy (LIBS) Setup

Introduction

• Parts:
1. Optex 193 nm (ArF) (1999/1999)
2. Optex 248 nm (KrF) (2000/2000)
3. Optex Nd:YAG (2006/2006)
• General Information
Laser-induced Breakdown Spectroscopy (LIBS) setup. The setup contains laser devices, spectrometers and other instruments.
1. The setup consists of the following lasers:
1) An argon fluoride (ArF) excimer (or exciplex) laser device; ultraviolet laser.
2) Neodymium-doped yttrium aluminium garnet (Nd: YAG) solid-state laser device.
3) A krypton fluoride (KrF) excimer (or exciplex) laser device; ultraviolet laser.
• Key Specifications       
1) (ArF): Wavelength: 193 nm
2) (KrF): Wavelength: 248 nm
3) (Nd: YAG): Wavelength: 1064 nm
4) Depth resolution: 1 μm per pulse
2 detectors:
1) Echelle spectrometer: Mechelle spectral system 7500 (Echelle grating), Multichannel Instruments, ICCD,  DiCAM-PRO, PCO 
Czerny-Turner spectrometer: SP-150. Acton Research Corp. ICCD, Instaspec V, Oriel + Delay generator, model DG 535, Stanford Research System, Inc.