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Home > Product > Material & Chemicals > Micro/NanoElectronics > Tris(tert-pentoxy)silanol

Tris(tert-pentoxy)silanol | CAS Number: 17906-35-3

Catalog Number
ACM17906353
Product Name
Tris(tert-pentoxy)silanol
Structure
CAS Number
17906-35-3
Synonyms
TRIS(TERT-PENTOXY)SILANOL;TRI-T-PENTOXYSILANOL;TRIS(TERT-PENTOXY)SILANOL99.99+%;Silicic acid (H4sio4), tris(1,1-dimethylpropyl) ester;Tri-t-pentoxysilanol (99.999%-Si) PURATREM;Tris(t-Pentoxy)Silanol
Molecular Weight
306.51
Molecular Formula
C15H34O4Si
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1Effect of catalyst layer density and growth temperature in rapid atomic layer deposition of silica using tris(tert-pentoxy)silanol.

Won SJ1, Kim JR, Suh S, Lee NI, Hwang CS, Kim HJ.

ACS Appl Mater Interfaces. 2011 May;3(5):1633-9. doi: 10.1021/am200176j. Epub 2011 May 3.

Rapid atomic layer deposition (RALD) of SiO₂ thin films was achieved using trimethyl-aluminum and tris(tert-pentoxy)silanol (TPS) as the catalyst and Si precursor, respectively. A maximum growth rate as high as ∼28 nm/cycle was obtained by optimizing the catalyst layer density, whereas the previous reports showed lower values of 12 to 17 nm/cycle [Hausmann et al. Science2002, 298, 402-406; Burton et al. Read More

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Tel:1-201-478-8534
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Fax: 1-516-927-0118
Address: Suite 212, Waverly Plaza, 755 Waverly Avenue, Holtsville, NY 11742, USA