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Home > Product > Material & Chemicals > Micro/NanoElectronics > Tetrakis(dimethylamino)titanium

Tetrakis(dimethylamino)titanium | CAS Number: 3275-24-9

Catalog Number
ACM3275249
Product Name
Tetrakis(dimethylamino)titanium
Structure
CAS Number
3275-24-9
Synonyms
TDMAT;TITANIUM TETRAKIS(DIMETHYLAMIDE);TITANIUM(IV) DIMETHYLAMIDE;TETRAKIS(DIMETHYLAMINO)TITANIUM;TETRAKIS(DIMETHYLAMINO)TITANIUM(IV);TETRAKIS (DIMETHYLAMIDO) TITANIUM;TETRAKIS(DIMETHYLAMIDO)TITANIUM(IV);Methanamine, N-methyl-, titanium(4+) salt
Molecular Weight
224.17
Molecular Formula
C8H24N4Ti
Purity
>97.0%(T)
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1Structure and photoluminescence of the TiO2 films grown by atomic layer deposition using tetrakis-dimethylamino titanium and ozone.

Jin C1, Liu B1, Lei Z2, Sun J1.

Nanoscale Res Lett. 2015 Feb 28;10:95. doi: 10.1186/s11671-015-0790-x. eCollection 2015.

TiO2 films were grown on silicon substrates by atomic layer deposition (ALD) using tetrakis-dimethylamino titanium and ozone. Amorphous TiO2 film was deposited at a low substrate temperature of 165°C, and anatase TiO2 film was grown at 250°C. The amorphous TiO2 film crystallizes to anatase TiO2 phase with annealing temperature ranged from 300°C to 1,100°C in N2 atmosphere, while the anatase TiO2 film transforms into rutile phase at a temperature of 1,000°C. Read More

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