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Home > Product > Material & Chemicals > Micro/NanoElectronics > Tetrakis(diethylamino)titanium

Tetrakis(diethylamino)titanium | CAS Number: 4419-47-0

Catalog Number
ACM4419470
Product Name
Tetrakis(diethylamino)titanium
Structure
CAS Number
4419-47-0
Synonyms
TDEAT;TETRAKIS (DIETHYLAMIDO) TITANIUM;TETRAKIS(DIETHYLAMINO)TITANIUM;TETRAKIS DIETHYL AMINO TITANIUM (IV);TITANIUM (IV) DIETHYLAMIDE;TITANIUM TETRAKIS(DIETHYLAMIDE);Titanium, tetrakis(diethylamino)-;TETRAKIS(DIETHYLAMINO)TITANIUM, 99.999%
Molecular Weight
336.38
Molecular Formula
C16H40N4Ti
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1Design and implementation of a novel portable atomic layer deposition/chemical vapor deposition hybrid reactor.

Selvaraj SK1, Jursich G, Takoudis CG.

Rev Sci Instrum. 2013 Sep;84(9):095109. doi: 10.1063/1.4821081.

We report the development of a novel portable atomic layer deposition chemical vapor deposition (ALD/CVD) hybrid reactor setup. Unique feature of this reactor is the use of ALD/CVD mode in a single portable deposition system to fabricate multi-layer thin films over a broad range from "bulk-like" multi-micrometer to nanometer atomic dimensions. The precursor delivery system and control-architecture are designed so that continuous reactant flows for CVD and cyclic pulsating flows for ALD mode are facilitated. Read More

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Tel:1-201-478-8534
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Address: Suite 212, Waverly Plaza, 755 Waverly Avenue, Holtsville, NY 11742, USA