Aldosari HM1, Simchi H1, Ding Z1, Cooley KA1, Yu SY1, Mohney SE1.
ACS Appl Mater Interfaces. 2016 Dec 21;8(50):34802-34809. Epub 2016 Dec 7.Surfaces of polycrystalline α-GeTe films were studied by X-ray photoelectron spectroscopy (XPS) after different treatments in an effort to understand the effect of premetallization surface treatments on the resistance of Ni-based contacts to GeTe. UV-O3 is often used to remove organic contaminants after lithography and prior to metallization; therefore, UV-O3 treatment was used first for 10 min prior to ex situ treatments, which led to oxidation of both Ge and Te to GeOx (x < 2) and TeO2, respectively. Read More