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Home > Product > Material & Chemicals > Micro/NanoElectronics > Bis(tert-butylimino)bis(dimethylamino)&

Bis(tert-butylimino)bis(dimethylamino)& | CAS Number: 406462-43-9

Catalog Number
ACM406462439
Product Name
Bis(tert-butylimino)bis(dimethylamino)&
Structure
CAS Number
406462-43-9
Synonyms
BIS(TERT-BUTYLIMINO)BIS(DIMETHYLAMINO)&;BIS(TERT-BUTYLIMINO)BIS(DIMETHYLAMINO)TUNGSTEN(VI), FOR CAMBRIDGE NANOTECH INC.;Bis(t-butyliMido)bis(diMethylaMido)tungsten(VI), Min. 97% BTBMW;Bis(tert-butyliMino)bis(diMethylaMino)tungsten(VI) 97%, 99.99% trace Me
Molecular Weight
414.24
Molecular Formula
C12H30N4W
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1Electronic structure of two precursors for nanofabrication: [(CH3)3CN]2W[N(CH3)2]2 and Ti(NMe2)2(NEt2)2.

Novak I1, Kovač B, Jokić M.

J Phys Chem A. 2014 Jul 31;118(30):5636-41. doi: 10.1021/jp505365n. Epub 2014 Jul 18.

The electronic structures of bis(tert-butylimino)bis(dimethylamino) tungsten and bis(N-ethylethanaminato)bis(N-methylmethanaminato) titanium heteroleptic complexes, which are precursors for atomic layer deposition of metallic nitride on surfaces, have been investigated by HeI and HeII UV photoelectron spectroscopy and DFT/OVGF calculations. We discuss the electronic structures of these two and other related d(0)-type complexes in relation to the mechanism of adsorption and decomposition of metal alkylamide precursors on surfaces.

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Tel:1-201-478-8534
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Address: Suite 212, Waverly Plaza, 755 Waverly Avenue, Holtsville, NY 11742, USA