Microstructure of Rhenium Coatings Deposited by CVD on Graphite and Mo Substrates

Lee S K, et al

Korean Journal of Metals and Materials, 2018, 8: 197-204

Rhenium coatings were fabricated on a graphite substrate at 1100 and 1250 ℃ and a molybdenum substrate at 1150 and 1250 ℃ by chemical vapor deposition (CVD) using ReCl5 precursor, and the effects of deposition temperatures and substrates on microstructure and crystal orientation were investigated. The rhenium coating on graphite infiltrated the pores about hundred micrometers into the graphite, resulting in a large contact area between the coating and the graphite. However, the rhenium coating on molybdenum showed inferior adhesion, introducing voids and cracks in the Mo metal due to additional reactions between the precursor and Mo. As deposition temperature increased, rhenium grains on the graphite increasingly developed a preferred (0002) orientation normal to the coating, while on molybdenum they tended to develop other orientations, such as pyramidal and prism planes. These behaviors were discussed in relation to interfacial microstructure.

Chemicals Related in the Paper:

Catalog Number Product Name Structure CAS Number Price
ACM13596355 Rhenium(V) chloride Rhenium(V) chloride 13596-35-5 Price

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